This book is designed to introduce typical cleanroom processes, techniques, and their fundamental principles. It is written for the practicing scientist or engineer, with a focus on being able to transition the information from the book to the laboratory. Basic theory such as electromagnetics and electrochemistry is described in as much depth as necessary to understand and explain the current practice and their limitations. Examples from various areas of interest will be covered, such as the fabrication of photonic devices including photo detectors, waveguides, and optical coatings, which are not commonly found in other fabrication texts.
Table of Contents
Introduction to Micro and Nano-Fabrication. Vacuum and Plasma technology. Physical vapor deposition. Chemical vapor deposition. Optical thin film coatings. Substrate materials. Photoresists and photolithography. Wet chemical etching. Plasma etching. Semiconductor Doping & annealing. Semiconductor metrology. Packaging. MEMS and microfluidic device fabrication. Fabrication examples.
Andrew Sarangan is a professor and associate director of the Electro-Optics Graduate Program at the University of Dayton, Dayton, Ohio. Dr. Sarangan’s current research interests include semiconductor optoelectronics, nanofabrication, and computational electromagnetics. He has developed graduate courses in nanofabrication,nanophotonics, optical thin films, and integrated optics. He is a senior member of the IEEE and the SPIE and a registered professional engineer in the state of Ohio. He is also an accomplished pilot and a certificated flight instructor.